Sa. Goodman et al., ELECTRICAL-PROPERTIES OF SC SCHOTTKY-BARRIER DIODES FABRICATED ON ARGON-ION SPUTTERED P-GAAS, JPN J A P 2, 37(1AB), 1998, pp. 10-12
Epitaxially grown p-GaAs wafers were bombarded with Ar-ions before the
deposition of scandium (Sc) on them. Current-voltage (I-V) measuremen
ts of these Schottky barrier diodes showed that the barrier height, se
ries resistance and ideality factor were increased as the Ar-ion fluen
ce was increased.