TRANSMISSION ELECTRON-MICROSCOPE SAMPLE SHAPE OPTIMIZATION FOR ENERGY-DISPERSIVE X-RAY SPECTROSCOPY USING THE FOCUSED ION-BEAM TECHNIQUE

By utilizing the focused ion beam (FIB) technique, we evaluated signal intensity ratios of analyzed areas and the matrix for energy dispersi ve X-ray spectroscopy with a transmission electron microscope (TEM-EDX ). In the case of conventional FIB samples (H-shape), electrons scatte red from the thin film area irradiate the sidewalls of the matrix (Si substrate) under the thin film position and they generate a large numb er of X-rays. These matrix signals are reduced by making samples as U- shaped and removing the underlying sidewalls. The final matrix (Si) X- ray signal is reduced by 90% compared with the conventional H-shaped s amples.