SPECTRAL CHARACTERISTICS OF MULTILAYER COBALT-CARBON MIRRORS FOR THE LAMBDA-APPROXIMATE-TO-7.5 NM RANGE

Authors
KOLACHEVSKII NN LOUIS E SPILLER E MITROPOLSKII MM BIJKERK F RAGOZIN EN
Citation
Nn. Kolachevskii et al., SPECTRAL CHARACTERISTICS OF MULTILAYER COBALT-CARBON MIRRORS FOR THE LAMBDA-APPROXIMATE-TO-7.5 NM RANGE, Quantum electronics, 27(8), 1997, pp. 712-716
Citations number
23
Journal title
Quantum electronics → ACNP
ISSN journal
10637818
Volume
27
Issue
8
Year of publication
1997
Pages
712 - 716
Database
ISI
SICI code
1063-7818(1997)27:8<712:SCOMCM>2.0.ZU;2-J
Abstract
Multilayer cobalt-carbon mirrors on Si(111) substrates were made by el ectron-beam deposition and polishing of the metal layers by Kr+ ion bo mbardment, A new spectroscopic method was developed for estimating the parameters of plane multilayer x-ray mirrors by illuminating a sample with broad-band radiation from a laser-plasma source and by subsequen t dispersion of this radiation with a diffraction grating operating in the transmission mode.