KINETIC-THEORY OF STOCHASTICALLY HEATED RF CAPACITIVE DISCHARGES

Stochastic sheath healing is the dominant heating mechanism at low pre ssures for radio frequency (RF) capacitive discharges, It produces an electron energy probability distribution function (EEPF) that approxim ates a two-temperature Maxwellian, as seen in both experiments and num erical simulations, We have used the fundamental kinetic equation to o btain a space-and time-averaged kinetic equation. We assume that elect rons with the chi component kinetic energy lower than a certain thresh old Phi are prevented from interacting with the sheath heating fields. With these approximations and either a knowledge of the central densi ty or an ansatz on Phi, we obtain a self-consistent solution for the q uasiequilibrium discharge parameters valid for low pressures in argon. The results are compared to those found in experiments, yielding reas onable agreement.