ASECA - A CELLULAR-AUTOMATA SIMULATION PROGRAM TOR A SILICON ANISOTROPIC SUPER-MICRO-ETCHING PROCESS IN AQUEOUS KOH

Authors
NISHIDATE K BABA M GAYLORD RJ
Citation
K. Nishidate et al., ASECA - A CELLULAR-AUTOMATA SIMULATION PROGRAM TOR A SILICON ANISOTROPIC SUPER-MICRO-ETCHING PROCESS IN AQUEOUS KOH, Computers in physics, 12(1), 1998, pp. 88-93
Citations number
24
Categorie Soggetti
Computer Science Interdisciplinary Applications","Physycs, Mathematical",Physics,"Physycs, Mathematical","Computer Science Interdisciplinary Applications
Journal title
Computers in physics → ACNP
ISSN journal
08941866
Volume
12
Issue
1
Year of publication
1998
Pages
88 - 93
Database
ISI
SICI code
0894-1866(1998)12:1<88:A-ACSP>2.0.ZU;2-Q
Abstract
A three-dimensional anisotropic super micro-etching of crystalline sil icon in aqueous KOH is simulated on an atomic level using a new three- dimensional cellular-automata calculational method, The etching simula tor ASECA is developed using a rule-based functional Mathematica progr amming style. The complete program codes and a detailed description of the algorithm are presented. (C) 1998 American Institute of Physics.