A GaAs tunnel junction is formed by molecular beam epitaxy at low subs
trate temperatures to incorporate excess arsenic, followed by an annea
l to precipitate the excess arsenic. This tunnel junction is comparabl
e in resistance and peak current density to tunnel junctions grown sto
ichiometrically. Owing to the inhomogeneity in this two-phase tunnel j
unction, there is only a slight indication of a current peak. This lac
k of a valley in the tunnelling characteristic results in a low voltag
e drop even for currents in excess of the peak current.