INTERFACE ROUGHNESS STATISTICS OF THIN-FILMS FROM ANGLE-RESOLVED LIGHT-SCATTERING AT 3 WAVELENGTHS

The possibility of determining interface roughness and crosscorrelatio n statistics of the two interfaces of a thin film from angle-resolved light scattering data at three wavelengths is investigated, It is show n that angle-resolved light scattering measurements at three wave-leng ths are not sufficient to determine the three power spectral density f unctions describing the thin film roughness. An attempt to combine ref lectance and transmittance scattering to determine the roughness of a thin film on a transparent substrate appears to work and provides enco uraging results. (C) 1998 Society of Photo-Optical Instrumentation Eng ineers.