Hydrogen-rich isomeric cyclosilazanes are prepared-as single-source pr
ecursors for silicon nitride-by reaction of 1,1- and 1,2-dimethylhydra
zine and 1,2-bis[(trifluoromethyl)sulfonyloxy]disilane, Tf-SiH2-SiH2-T
f. The molecular structure of ,N'-bis(dimethylamino)-2,3,4,5-tetrasila
piperazine (1) indicates peripheral Me2N --> SiH2 dative bonding.