ELECTROCHEMICAL MICROMACHINING OF SILICON PLATFORMS FOR OPTICAL-FIBERALIGNMENT

Authors
GUENDOUZ M PEDRONO N CHARRIER J JOUBERT P LEROUZIC J
Citation
M. Guendouz et al., ELECTROCHEMICAL MICROMACHINING OF SILICON PLATFORMS FOR OPTICAL-FIBERALIGNMENT, Electronics Letters, 33(20), 1997, pp. 1695-1696
Citations number
5
Categorie Soggetti
Engineering, Eletrical & Electronic
Journal title
Electronics Letters → ACNP
ISSN journal
00135194
Volume
33
Issue
20
Year of publication
1997
Pages
1695 - 1696
Database
ISI
SICI code
0013-5194(1997)33:20<1695:EMOSPF>2.0.ZU;2-5
Abstract
The authors present an original and low-cost technique for placing and aligning, optical fibres on silicon platforms. Porous silicon obtaine d by electrochemical etching in delineated areas is used as a sacrific ial material. It is shown that this method, which is not dependent on the crystallographic orientations, provides well-defined grooves.