INTEGRATION OF CMOS-VLSI AND LIGHT-EMITTING SOURCES BY CAPACITIVE COUPLING

A novel principle is proposed for integration of III-V light sources w ith CMOS VLSI circuits. The flipped III-V chip is connected to the CMO S chip by capacitive coupling instead of by a conductive connection me thod. Energy is transmitted through a dielectric connection layer usin g a high frequency carrier signal. The proposed system requires no pos t-processing of the CMOS circuits and offers potentially high reworkab ility and good coupling efficiency.