M. Hakovirta et al., PROTRUSIONS ON THE SURFACE OF GRAPHITE CATHODE USED IN THE TETRAHEDRAL AMORPHOUS-CARBON FILM DEPOSITION, DIAMOND AND RELATED MATERIALS, 7(1), 1998, pp. 23-25
We report the growth of protrusions on the surface of graphite cathode
in a pulsed plasma are-discharge method, which is used for producing
tetrahedral amorphous carbon (ta-C) films. The bonding structure of th
e protrusions were studied using the electron spectroscopy for chemica
l analyses (ESCA) method and the protrusions were found to consist of
pure graphite. The morphology of the protrusions was studied using a s
canning electron microscope (SEM). The growth of the protrusions is no
n-beneficial since ii diminishes the carbon plasma yield in a short ti
me (similar to 1 h:) to a level too low for any practical application.
This effect can be eliminated in situ by mechanical abrasion of the s
urface of the graphite cathode. (C) 1998 Elsevier Science S.A.