DETERMINATION OF HYDROGEN IN SILICON, GERMANIUM, ALUMINUM, AND OTHER HIGH-PURITY SUBSTANCES BY HIGH-TEMPERATURE EXTRACTION

A comparative analysis of the potential of high-temperature extraction in a vacuum and in an inert-gas flow was performed. It was shown that hydrogen can be determined at a level of (1-3) x 10(-6)% using vacuum extraction, whereas hydrogen at higher concentrations of (5-10) x 10( -6)% can be determined using high-temperature inert-gas extraction. Th e fundamentals and procedures of the determination of hydrogen in high -purity silicon, germanium, aluminum, indium, gallium, tin, lead, cadm ium, and tellurium were developed. Germanium and silicon were analyzed by the vacuum heat technique in an open graphite crucible at temperat ures of 900 and 1100 degrees C, respectively; a cascade graphite cruci ble at a temperature of 900 degrees C and the vacuum melting technique were used for analyzing indium, gallium, tin, lead, cadmium, and tell urium. Aluminum and its alloys were analyzed using the high-temperatur e inert-gas extraction technique with sample melting (no longer than 1 0-15 s) in the analysis mode natural for the sample. The detection lim it of hydrogen was found to be (2-6) x 10(-7)% in vacuum extraction an d (5-7) x 10-7% in high-temperature inert-gas extraction (for a sample of mass 6-7 g). The blank correction in the vacuum melting method was 0.01-0.03 mu g/min, the limit of determination of hydrogen was found to be (2-5) x 10(-6)%, and the relative standard deviation of the resu lts of replicate measurements was 10-15%.