PVD PROCESSES - VACUUM GAUGES FOR THE PLASMA ENVIRONMENT

Authors
MATTOX DM
Citation
Dm. Mattox, PVD PROCESSES - VACUUM GAUGES FOR THE PLASMA ENVIRONMENT, Plating and surface finishing, 85(2), 1998, pp. 40-41
Citations number
NO
Categorie Soggetti
Metallurgy & Metallurigical Engineering","Materials Science, Coatings & Films
Journal title
Plating and surface finishing → ACNP
ISSN journal
03603164
Volume
85
Issue
2
Year of publication
1998
Pages
40 - 41
Database
ISI
SICI code
0360-3164(1998)85:2<40:PP-VGF>2.0.ZU;2-A