CHARACTERIZATION OF ULTRASONIC SPRAY PYROLYZED RUTHENIUM OXIDE THIN-FILMS

The ultrasonic spray pyrolysis (USP) technique was employed to deposit ruthenium oxide thin films. The films were prepared at 190 degrees C substrate temperature and further annealed al 350 degrees C for 30 min in air. The films were 0.22 mu thick and black grey in color. The str uctural, compositional and optical properties of ruthenium oxide thin films are reported. Contactless transient photoconductivity measuremen t was carried out to calculate the decay time of excess charge carrier s in ruthenium oxide thin films. (C) 1997 Elsevier Science S.A.