Cjr. Sheppard et Z. Hegedus, RESOLUTION FOR OFF-AXIS ILLUMINATION, Journal of the Optical Society of America. A, Optics, image science,and vision., 15(3), 1998, pp. 622-624
The fundamental limit to resolution of a perfect lens for off-axis obj
ect points is considered. It has been shown previously that resolution
decreases with illumination. Here it is shown that the relative decre
ase in resolution with illumination angle is reduced for lenses of hig
her numerical aperture. These results are of importance for optical sy
stems that combine high aperture with large field of view, such as lit
hographic lenses. (C) 1998 Optical Society of America.