We present an extensive study of the homoepitaxial growth of (001) CdT
e with st particular emphasis on the variation of the lattice paramete
r and on the determination of the surface stoichiometry during the gro
wth as well as the related evolution of the growth rate. An oscillator
y behavior of the in plane lattice parameter during the 2D homoepitaxi
al growth of (001) CdTe is demonstrated. It is associated to a deforma
tion, induced by the surface reconstructions, at the free edges of the
small islands formed during the growth by molecular beam epitaxy (MBE
) or atomic layer epitaxy. During the MBE growth, the presence on top
of the CdTe growing surface of both chemisorbed dimerized tellurium at
oms and weakly bonded Te atoms adsorbed on top of this Te layer is evi
denced. The influence of the stoichiometry on the evolution of the gro
wth rate is demonstrated. Moreover, an influence of strain on the grow
th mechanisms of CdTe has been observed. (C) 1998 Elsevier Science B.V
.