We describe the use of n- and p-type delta-doping layers in n-In0.53Ga
0.47As for Schottky barrier enhancement. The delta-doping layers are i
ntroduced by MOCVD using silicon and zinc dopants respectively. From c
urrent-voltage characteristics of Au/In0.53Ga0.47As diodes measured at
room temperature, we find substantial effective Schottky barrier heig
ht enhancement, with a best value of 0.69 eV and corresponding idealit
y factor of 1.06. Numerical modelling of Poisson's equation for these
structures predicts effective barrier heights in good agreement with t
hose measured. (C) 1998 Elsevier Science B.V.