The formation of coherent three-dimensional (3D) islands during Strans
ki-Krastanov growth of semiconductors is modelled with rate equations.
Effects of strain are included in the growth rate of two-dimensional
(2D) islands (atop a wetting layer) and in the transformation of 2D in
to 3D islands. Comparisons with measured 3D island densities for InP g
rown on GaP-stabilised GaAs(001) by metalorganic vapor-phase epitaxy a
re used to parametrize the model and to identify the rate-determining
steps for 3D island formation. (C) 1998 Elsevier Science B.V.