PREPARATION AND CHARACTERIZATION OF (PB,LA)TIO3 THIN-FILMS BY SOLID SOURCE MIXTURE METAL-ORGANIC CHEMICAL-VAPOR-DEPOSITION

(Pb,La)TiO3 (PLT) thin films were deposited on Pt/SiO2/Si substrate by metal-organic chemical vapor deposition technique using solid deliver y system. The thermal stability and pyrolysis characteristics of the m etal-organic precursors were investigated through differential scannin g calorimetry and thermal gravimetric analysis. Mixture of metal-organ ic precursors having a wide range of La dopant concentration were prep ared to investigate the effects of La doping on the structural and die lectric properties of PLT thin films. As La concentration increases, t he crystal structure of PLT thin films changed from tetragonal to cubi c and dielectric constant increased.