Sh. Lee et al., CHARACTERIZATION OF METAL-DOPED PB(ZR0.52TI0.48)O-3 THIN-FILMS PREPARED BY SOL-GEL METHOD, Journal of the Korean Physical Society, 32, 1998, pp. 1670-1672
Nd3+ and Ni2+ doped Pb(Zr0.52Ti0.48)O-3 (PZT) thin films were prepared
by sol-gel method on Pt/Ti/SiO2/Si substrates. The crystal structure,
the dielectric and ferroelectric properties of metal doped PZT films
were investigated. The crystal structure and surface morphologies of t
his films depended on Nd and Ni concentration. The dielectric constant
of Nd doped PZT films increased with Nd concentration, The polarizati
on and coercive field depended on Nd and Ni concentration.