K. Richter et al., USE OF A MASS-THICKNESS MARKER TO ESTIMATE SYSTEMATIC-ERRORS AND STATISTICAL NOISE IN THE DETECTION OF PHOSPHORUS BY ELECTRON SPECTROSCOPICIMAGING, Micron, 28(5), 1997, pp. 407-418
The element signal obtained from electron-energy-filtered micrographs
depends on the systematic error in calculating the background and on t
he noise in the background-corrected image. Both systematic error and
statistical fluctuation of the background can be assessed experimental
ly with a specimen that combines the element-containing feature with a
mass-thickness marker. The approach is described for the mapping of p
hosphorus in turnip yellow mosaic viruses prepared on a supporting car
bon film of variable thickness. The thickness modulations are produced
by the additional deposition of heat-evaporated carbon through a seco
nd grid used as a mask. The three-window power-law method and the two-
window difference method are compared. With the three-window power-law
method, the mass-thickness modulations of the marker are still visibl
e in the map, indicating a systematic error for the calculated backgro
und. In addition, the intensity profile over the area of the thick car
bon him is broader than in the map corrected by the two-window method,
indicating a higher level of noise. With the two-window difference me
thod, mass-thickness contrast was practically eliminated due to an imp
roved protocol that uses the mass-thickness marker to calculate the sc
aling factor: instead of scaling the grey-level of a single background
feature, the pre-edge image is scaled to the contrast of the marker a
rea in the image acquired at the element-specific energy loss. (C) 199
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