MeV energy ion-implantation induced modifications in simple binary gla
ss As2Se3 have been monitored by de conductivity measurements. The stu
dy testifies that the process of ion-implantation at MeV energy is a n
ovel technique in modifying the electronic properties of semiconductor
s. Ni ion seems to have more drastic changes than Ag and Ge ions. As s
mall a dose of 75 MeV Ni ions as 5 x 10(13) ions/cm(2) is sufficient t
o produce remarkable changes in the conductivity of bombarded samples.
The ion-induced defects appear to get diffused to a much deeper exten
t than the projected range. (C) 1998 Elsevier Science Ltd. All rights
reserved.