OPTICAL 2ND-HARMONIC PROBE FOR ULTRA-HIGH FREQUENCY ON-CHIP INTERCONNECTS WITH BENZOCYCLOBUTENE

We report the application of electric field-induced second-harmonic (E FISH) generation for time-resolved measurement of ultra-fast electrica l pulses propagating on thin-film microstrip lines fabricated with a p olymer based on benzocyclobutene as a dielectric layer on a silicon su bstrate. This contactless field detection enables the characterization of electric pulses on the transmission line up to 1.95 THz. In compar ison to external electro-optic sampling the EFISH technique provides a better characterization tool concerning time-resolution and noninvasi veness. (C) 1998 American Institute of Physics.