Deep Level Transient Spectroscopy (DLTS) has been applied to investiga
te the electronic properties of self-organized InAs quantum dots. The
energies of electronic ground states of 2.5ML and 1.7ML InAs quantum d
ots (QDs) with respect to the conduction band of bulk GaAs are about 0
.21 eV and 0.09 eV, respectively. We have found that QDs capture elect
rons by lattice relaxation through a multi-phonon emission process. Th
e samples are QDs embedded in superlattices with or without a 500 Angs
trom GaAs spacing layer between every ten periods of a couple of GaAs
and InAs layers. The result shows that the density of dislocations in
the samples with spacer layers is much lower than in the samples witho
ut the spacer layers.