A. Bendeddouche et al., STRUCTURAL CHARACTERIZATION OF AMORPHOUS SICXNY CHEMICAL-VAPOR-DEPOSITED COATINGS, Journal of applied physics, 81(9), 1997, pp. 6147-6154
Chemical bonding and local order around the different atoms of thick a
morphous SiCxNy deposits [0.03 less than or equal to x/(x+y) less than
or equal to 0.67] prepared with chemical vapor deposition at 1000-120
0 degrees C using TMS-NH3-H-2 have been investigated using x-ray photo
electron spectroscopy (XPS), Raman spectrometry, Fourier transform inf
rared spectrometry (FT-IR), electron energy loss spectroscopy (EELS) a
nd Si-29 magic-angle spinning nuclear magnetic resonance spectrometry
(MAS-NMR). XPS analyses have shown that the main bonds are Si-C, Si-N
and C-C, and have suggested the existence of C-N bonds. According to R
aman analyses and complementary FT-IR absorption of thin films, the co
atings are nonhydrogenated. Si, C and N atomic chemical environments a
re more complicated than in a mixture of pure Si3N4-SiC phases. The ex
amination of the Si KL2,3L2,3 line shapes recorded by XPS have allowed
one to state the existence of Si(C4-nNn) units. Mixed coordination sh
ells around silicon have been confirmed by EELS analyses; Additionally
, FT-IR reflection analyses have proved that Si is both bonded with N
and C. Indirect indication has been obtained owing to the Si-29 MAS-NM
R analyses of powders. Raman analyses have been conclusive to assume t
hat C-C bonds correspond to a mixed sp(3)-sp(2) carbon configuration l
inked with Si(C4-nNn) tetrahedra with 0 less than or equal to n less t
han or equal to 4. (C) 1997 American Institute of Physics.