MICRO-RAMAN STUDY OF DIAMOND-LIKE ATOMIC-SCALE COMPOSITE FILMS MODIFIED BY CONTINUOUS-WAVE LASER ANNEALING

We have modified the properties of diamondlike atomic-scale composite (DLASC) material of various thicknesses (5-70 mu m) by means of cw Ar- ion laser annealing using a focused beam (similar to 2 mu m spot size) . These DLASC films [amorphous ''diamondlike/quartzlike'' a-(C:H/Si:O) ] constitute a novel class of diamond-related materials. The laser ann ealing effects were investigated by micro-Raman scattering. The struct ure of these films can be altered locally from amorphous to nanocrysta lline depending not only on the parameters of the annealing process (a nnealing time, laser intensity) but also the mechanical properties (ha rdness, stress) of the films. For comparison purposes we also measured the effects of thermal annealing. (C) 1997 American Institute of Phys ics.