LOW-TEMPERATURE THERMOMETER USING SPUTTERED ZRNX THIN-FILM

A thin film thermometer using sputtered zirconium nitride has been inv estigated as a low-temperature thermometer. This film deposited on a s apphire substrate can be used to measure a wide temperature range from 1 to 300 K with reasonable sensitivity within a fast response time. T he thermometer sensitivity can be altered by changing fabrication cond itions. Moreover, the thermometer is almost insensitive to magnetic fi elds. The temperature error in a magnetic field of 6T is less than 10 mK at 4.2 K. (C) 1998 Elsevier Science Ltd. All rights reserved.