PROCESSING AND PROPERTIES OF (MO,CR) OXYCARBIDES FROM MOCVD

A review of the coating kinetics of molybdenum and chromium oxycarbide s and a study on the properties of deposited films are reported, Molyb denum carbonyl, chromium carbonyl and their mixture were used to prepa re coatings at temperatures between 170 and 450 degrees C on SS304 or SiC substrates by a process of metal-organic chemical vapor deposition (MOCVD), The processing parameters of the coatings, such as the evapo ration of precursors, coating pressure and temperature, are discussed along with the coating rates, compositions and other microstructural i nformation, so to reveal the kinetics of the coating process on two di fferent substrates, In addition, the chemical composition, crystalline phases and microstructure of the coatings obtained in various conditi ons are presented with the evidence interpreted by various electron-mi croscopic and spectroscopic techniques, including XRD, EDS, EPMA and X PS, The dependence of some properties, such as hardness, adhesive stre ngth and corrosive resistance of the coatings on SS 304, on their comp osition and the deposited phases, i.e. as a function of coating temper ature and pressure, is reviewed. (C) 1998 John Wiley & Sons, Ltd.