Process improvements in silica membrane fabrication, especially the us
e of clean-room techniques, resulted in silica membranes without detec
table mesoscopic defects, resulting in significantly improved transpor
t properties. Supported membranes calcined at 400 degrees C were 30 na
nometers in thickness, showed a H-2 permeance at 200 degrees C of 2 x
10(-6) moles per square meter per second per Pascal (mol m(-2) s(-1) P
a-1), and had a CH4 permeance more than 500 times smaller. Molecules l
arger than CH4 were completely blocked. Silica membranes calcined at 6
00 degrees C showed no detectable CH4 flux, with a H-2 permeance of 5
x 10(-7) (mol m(-2) s(-1) Pa-1) at 200 degrees C. These results signif
y an important step toward the industrial application of these membran
es such as purification of H-2 and natural gas as well as the selectiv
e removal of CO2.