The screening of an impurity in the quasi-two-dimensional (2D) electro
n gas in a delta-doped semiconductor structure is investigated. The sc
reened impurity matrix elements are calculated and compared using thre
e different approaches: the 2D random phase approximation (RPA), the c
orresponding 2D Thomas-Fermi theory and a quasi-three-dimensional (3D)
Yukawa-like screening model. It is found that the 2D Thomas-Fermi the
ory differs from the RPA result, even in the limit of low q vectors, i
f more than one subband is occupied. This result is explained analytic
ally by closely examining the q --> 0 limit of the dielectric tenser.
The 2D Thomas-Ferni theory is shown to represent a poor approximation
to the RPA whereas the quasi-3D screening model agrees well with the R
PA results for not too small q vectors. Furthermore, this model reduce
s computing times by orders of magnitude in comparison with the RPA. T
hus, our 3D screening model considerably simplifies the calculation of
impurity scattering rates in the investigation of the electron mobili
ty in a delta-doping layer. (C) 1998 Academic Press Limited.