KINETICS OF EVAPORATION OF CU BEADED FILMS ON SAPPHIRE

Kinetics of evaporation of beaded Cu films from a sapphire substrate a t 2-3 x 10(-8) mbar were investigated by means of Auger electron spect roscopy in the temperature range 893-978 K. Measuring the time depende nce of the normalized Auger intensity of Cu, we concluded that the pro cess is controlled by a surface reaction at the perimeters of beads. F rom the temperature dependence of the initial and final parts of these curves we were able to determine the energy of activation of the deso rption of Cu and of the surface reaction as well.