K. Fobelets et G. Borghs, INFLUENCE OF THE UNDOPED SPACER LAYER THICKNESS ON THE DC CHARACTERISTICS OF N-TYPE GAAS ALAS MESFET/, Semiconductor science and technology, 13(3), 1998, pp. 318-321
We have investigated the influence of the thickness of an undoped spac
er layer under the channel an the current-voltage characteristics of G
aAs MESFETs. To that purpose we have grown the active layers of the ME
SFETs on top of a 50 nm AlAs layer to separate the device effectively
from the undoped GaAs substrate. Substrate leakage currents are of the
order of 10(-7) A at 30 V source-substrate bias. DC characteristics a
re measured for four MESFETs with identical layer structure and doping
but different spacer layer thicknesses. Comparison shows that MESFETs
with thin spacer layers can he useful for low-noise applications but
lose in transconductance and mobility values.