THE MECHANICAL, TRIBOLOGICAL AND OPTICAL-PROPERTIES OF CNX COATINGS PREPARED BY SPUTTERING METHODS

CNx coatings were prepared by DC magnetron sputtering at different N-2 pressures. Increase of N-2 pressure led to the increase of nitrogen c ontent N/C in the films, but decreased their microhardness. Evaluation of optical properties and electron-energy-loss function combining spe ctroscopic ellipsometry (1.5-4 eV) and VUV reflection spectroscopy (4- 14 eV) by means of Kramers-Kronig analysis showed increase of the pi-p lasmon resonance peak, which indicates enhancement of the amount of pi -bonded electrons. It demonstrates increase of sp(2) hybridization. Th e extrapolated energy gap indicates more semimetallic properties of th e CNx films due to nitrogenation. (C) 1998 Elsevier Science S.A.