DEVELOPMENT AND INVESTIGATION OF A STANDARD FLUID MECHANICAL FLOW-RATE METER

Authors
KUZMIN VV
Citation
Vv. Kuzmin, DEVELOPMENT AND INVESTIGATION OF A STANDARD FLUID MECHANICAL FLOW-RATE METER, Vacuum, 49(1), 1998, pp. 17-23
Citations number
9
Categorie Soggetti
Physics, Applied","Material Science
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
49
Issue
1
Year of publication
1998
Pages
17 - 23
Database
ISI
SICI code
0042-207X(1998)49:1<17:DAIOAS>2.0.ZU;2-U
Abstract
An automated fluid mechanical flow rate meter wh,ich provides for meas uring gas flow rates in vacuum over the range from 10(-5) to 1 m(3)Pa/ s is described. The time it takes for the measurement to be carried ou t is not more than 5-15 min. A meter equation was derived, and constru ctional and operational features of the device were evaluated. The inf luence of additional processes and temperature variations on the meter readings was analyzed. The results of metrological investigations of the apparatus and the measured data concerning its practical use are p resented. (C) 1998 Elsevier Science Ltd. All rights reserved.