ATOMIC-FORCE MICROSCOPY STUDY OF ATOMICALLY FLAT (001) DIAMOND SURFACES TREATED WITH HYDROGEN PLASMA

An atomically flat (001) diamond surface has been obtained by hydrogen -plasma treatment. Atomic force microscopy shows that the diamond surf ace after the treatment consists of successive terraces with atomic st eps running parallel to the [110] direction. Step bunching with severa l atoms high sometimes takes place originating from the remaining poli shing marks. The morphology is sensitive to the surface temperature du ring the treatment; the step bunching is not observed on the surfaces treated at higher temperatures (> 850 degrees C), The experimental res ults indicate that the lateral propagation of the atomic steps takes p lace during the hydrogen-plasma treatments. (C) 1998 Elsevier Science B.V.