CHARACTERIZATION OF TITANIUM NITRIDE LAYERS BY GRAZING-EMISSION X-RAY-FLUORESCENCE SPECTROMETRY

Grazing-emission X-ray fluorescence spectrometry is a new development in X-ray metrology instrumentation. The combination of wavelength-disp ersive detection with a total-reflection geometry in the detection pat h allows thin layer characterization also for light elements. The tech nique was applied to analyze a series of titanium nitride layers, reac tively sputtered using different Ar/N-2 flow ratios of the working gas . Composition, thickness and density of the layers result from fitting the experimental data to model calculations. It was found that above a critical flow value, the samples are slightly over-stoichiometric (w ith respect to nitrogen) with a considerably reduced density. The GEXR F method has potential both for complete layer characterization and fo r process control with layer density as the control parameter. (C) 199 8 Elsevier Science B.V.