G. Wiener et al., CHARACTERIZATION OF TITANIUM NITRIDE LAYERS BY GRAZING-EMISSION X-RAY-FLUORESCENCE SPECTROMETRY, Applied surface science, 125(2), 1998, pp. 129-136
Citations number
15
Categorie Soggetti
Physics, Applied","Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Grazing-emission X-ray fluorescence spectrometry is a new development
in X-ray metrology instrumentation. The combination of wavelength-disp
ersive detection with a total-reflection geometry in the detection pat
h allows thin layer characterization also for light elements. The tech
nique was applied to analyze a series of titanium nitride layers, reac
tively sputtered using different Ar/N-2 flow ratios of the working gas
. Composition, thickness and density of the layers result from fitting
the experimental data to model calculations. It was found that above
a critical flow value, the samples are slightly over-stoichiometric (w
ith respect to nitrogen) with a considerably reduced density. The GEXR
F method has potential both for complete layer characterization and fo
r process control with layer density as the control parameter. (C) 199
8 Elsevier Science B.V.