Ff. Umarov et al., FORMATION OF RECOIL ATOMS AND LAYER-BY-LAYER SPUTTERING OF THE SINGLE-CRYSTAL SURFACE UNDER ION-BOMBARDMENT AT GRAZING ANGLES, Applied surface science, 125(2), 1998, pp. 221-226
Citations number
13
Categorie Soggetti
Physics, Applied","Physics, Condensed Matter","Chemistry Physical","Materials Science, Coatings & Films
Formation of recoil atoms on a single crystal surface under low energy
ion bombardment at grazing angles has been investigated by a computer
simulation method. The yields of the primary knocked out recoil atoms
and their energies, as well as the relationship of the number of form
ed recoil atoms with the impact points of ions and peculiarities of io
n trajectories were determined. The mechanism of layer-by-layer sputte
ring of a surface at bombardment under grazing angles has been propose
d. The possibility of application of such sputtering for single crysta
l layer-by-layer analysis with high sensitivity was shown. (C) 1998 El
sevier Science B.V.