A VISUALIZATION TECHNIQUE FOR SURFACE FLOWS

A technique for the visualization of film coverage is described. The t echnique can be applied in instances where surface regions wetted by a flow need to be identified, but cannot be visualized in real time due to geometric considerations (difficult to reach or observe surfaces). The method introduces chemicals into a water how in addition to other chemicals on the surfaces on which the water film coverage is to be v isualized. The chemicals react wherever the how is incident on the sur faces, leaving an identifiable pattern. The technique is applied in th e study of silicon wafer rinsing, which is extensively used in microel ectronics manufacturing.