SCANNING ACOUSTIC FORCE MICROSCOPE MEASUREMENTS ON GRATING-LIKE ELECTRODES

Grating-like metal electrodes supplied with high- and low-frequency vo ltages were investigated by a Scanning Acoustic Force Microscope (SAFM ). On piezoelectric LiNbO3, these electrodes form an inter-digital tra nsducer which generates surface acoustic waves according to the charge distribution on its electrodes when excited at a transducer's passban d frequency. The influence of surface deformation and of surface charg es on the cantilever deflection of the SAFM in contact and non-contact mode was systematically studied. Comparing the images of the electrod es which were prepared on piezoelectric and dielectric substrates, sur face deformation and charge distributions were qualitatively separated .