VOLATILE LEAD BETA-DIKETONATES AS CVD PRECURSORS

Authors
KRISYUK VV TURGAMBAEVA AE IGUMENOV IK
Citation
Vv. Krisyuk et al., VOLATILE LEAD BETA-DIKETONATES AS CVD PRECURSORS, CHEMICAL VAPOR DEPOSITION, 4(2), 1998, pp. 43
Citations number
16
Categorie Soggetti
Materials Science, Coatings & Films",Electrochemistry,"Physics, Condensed Matter
Journal title
CHEMICAL VAPOR DEPOSITION → ACNP
ISSN journal
09481907
Volume
4
Issue
2
Year of publication
1998
Database
ISI
SICI code
0948-1907(1998)4:2<43:VLBACP>2.0.ZU;2-4
Abstract
Communication: The use of lead beta-diketonates as precursors in the C VD of many ferroelectric, pyroelectric, and superconducting oxide film s is attracting increasing interest. This paper reports on the vapor p ressures, decomposition characteristics, and possible reaction mechani sms for a number of such lead complexes, and investigates their use fo r the CVD of lead oxide films. The Figure shows an SEM of a PbO film f rom one of the precursors.