RADICAL PROCESSES IN THE PYROLYSIS OF TRIALKYL COMPOUNDS OF GROUP-13 CVD PRECURSORS

The pyrolysis of a number of trialkyl compounds of Group 13 elements i n the gas phase and on surfaces of silica and pyrolysis products has b een investigated using matrix isolation and ESR detection of free radi cals coupled with GC-MS and H-1 NMR analysis of hydrocarbon products. ESR signals arising from alkyl radicals were detected in almost all sy stems; the relative strengths of radical signals were rationalized in terms of trends in metal-alkyl bond strengths, propensities for beta-h ydride elimination of alkenes, and radical loss routes. The latter wer e confirmed by end-product analysis.