INDEPENDENT DETECTION OF VERTICAL AND LATERAL FORCES WITH A SIDEWALL-IMPLANTED DUAL-AXIS PIEZORESISTIVE CANTILEVER

A dual-axis atomic force microscope (AFM) cantilever with independent piezoresistive sensors has been developed for simultaneous detection o f vertical and lateral forces. The cantilever consists of a flat, tria ngular probe connected to a base by four tall, narrow ribs, The vertic ally compliant triangular probe and the laterally compliant ribs incor porate separate piezoresistors for vertical and lateral force sensing. In the fabrication process, a special oblique ion implant technique i s used to produce electrical elements on vertical sidewalls and horizo ntal surfaces of the cantilever structure at the same time. The dual-a xis cantilever has been used to perform microfriction measurements as well as obtain simultaneous vertical-force and lateral-force AFM image s. (C) 1998 American Institute of Physics.