MICROMACHINED 2-DIMENSIONAL ARRAY PIEZOELECTRICALLY ACTUATED TRANSDUCERS

This letter presents micromachined two-dimensional array flextensional transducers that can be used to generate sound in air or water. Indiv idual array elements consist of a thin piezoelectric ring and a thin, fully supported, circular membrane. We report on an optimum design for an individual array element based on finite element modeling. We manu facture the transducer in two-dimensional arrays using planar silicon micromachining and demonstrate ultrasound transmission in air at 2.85 MHz. Such an array could be combined with on-board driving and an addr essing circuitry for different applications. (C) 1998 American Institu te of Physics.