A 2-DIMENSIONAL ULTRAHIGH-VACUUM POSITIONER FOR SCANNING-TUNNELING-MICROSCOPY

Authors
POND K NOSHO BZ STUBER HR GOSSARD AC WEINBERG WH
Citation
K. Pond et al., A 2-DIMENSIONAL ULTRAHIGH-VACUUM POSITIONER FOR SCANNING-TUNNELING-MICROSCOPY, Review of scientific instruments, 69(3), 1998, pp. 1403-1405
Citations number
10
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
69
Issue
3
Year of publication
1998
Pages
1403 - 1405
Database
ISI
SICI code
0034-6748(1998)69:3<1403:A2UPFS>2.0.ZU;2-9
Abstract
A two-dimensional ultrahigh vacuum compatible positioner is presented. The positioner uses two piezoelectric inchworms which allow for motio ns of up to 1 cm viith a precision of 4 nm mounted at right angles to each other in order to give two dimensions of motion. Images of three- dimensional In0.3Ga0.7As islands in cross section are presented to dem onstrate the functionality of the positioner. It is found that motion towards the tip is smooth, while motion in the perpendicular direction is less smooth. (C) 1998 American Institute of Physics. [S0034-6748(9 8)03903-3].