J. Kushibiki et M. Arakawa, A METHOD FOR CALIBRATING THE LINE-FOCUS-BEAM ACOUSTIC MICROSCOPY SYSTEM, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 45(2), 1998, pp. 421-430
Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy sys
tem is investigated for measurements of the leaky surface acoustic wav
e (LSAW) velocity and attenuation, and a method of system calibration
is proposed. In order to discuss the accuracy, it is necessary to intr
oduce a standard specimen whose bulk acoustic properties, (e.g., the i
ndependent elastic constants and density) are measured with high accur
acy. Single crystal substrates of gadolinium gallium garnet (GGG) are
taken as standard specimens. The LSAW propagation characteristics are
measured and compared with the calculated results using the measured b
ulk acoustic properties. Calibration is demonstrated for the system us
ing two LFB acoustic lens devices with a cylindrical concave surface o
f 1-mm radius in the frequency range 100 to 300 MHz.