THE CHARGE-STATE OF RECOILS UNDER SURFACE BOMBARDMENT BY MULTIPLE CHARGE IONS

A model of charge state formation of particles sputtered of a metal su rface bombarded by low energy multiple charged ions was proposed. It i s based on the idea of sensitivity of electron exchange processes to t he local surface electron density. The model describes the dependence of the degree of sputtered particle ionization on the charge and the i nitial energy of the bombarding ions. It has been found that a larger primary charge of bombarding ions causes a higher degree of ionization of sputtered particles. The results are in a good agreement with meas urements.