LASER-INITIATED REACTIVITY IN CONSTRAINED GAS-EXPANSIONS USING TRIMETHYLGALLIUM AND AMMONIA AS PRECURSORS

The present work combines pulsed lasers and nozzles in order to form G aN-containing species by using metalorganic compounds as precursors. T he apparatus consists of a high-vacuum chamber equipped with a special ized dual-source pulsed-nozzle assembly and a quadrupole mass spectrom eter (QMS). Ammonia and trimethylgallium are introduced into the high- vacuum chamber via the nozzle assembly. The 193 nm output from an ArF excimer laser is focused into the mixing and reaction region of the no zzle assembly. Reaction products are subsequently mass-analyzed with t he QMS and show efficient production of simple GaN-containing species due to laser-assisted growth. (C) 1998 Elsevier Science B.V.