DEPENDENCE OF CARRIER LIFETIME AND RESISTIVITY ON ANNEALING IN INP GROWN BY HE-PLASMA-ASSISTED MOLECULAR-BEAM EPITAXY

Citation
Ju. Kang et al., DEPENDENCE OF CARRIER LIFETIME AND RESISTIVITY ON ANNEALING IN INP GROWN BY HE-PLASMA-ASSISTED MOLECULAR-BEAM EPITAXY, Journal of applied physics, 83(6), 1998, pp. 3423-3425
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
83
Issue
6
Year of publication
1998
Pages
3423 - 3425
Database
ISI
SICI code
0021-8979(1998)83:6<3423:DOCLAR>2.0.ZU;2-2
Abstract
We have experimentally investigated the carrier lifetime and resistivi ty versus anneal temperature in InP films grown by He-plasma-assisted molecular beam epitaxy. This material is shown to exhibit picosecond c arrier lifetime with high resistivity even after anneal at temperature s up to 700 degrees C. (C) 1998 American Institute of Physics.