The near-edge X-ray absorption fine structure (NEXAFS) technique was a
pplied to characterize the oxidation stares of titanium cations on TiO
2(001) surfaces reduced by argon-ion bombardment and reoxidized by the
rmal treatment. Although many characterization studies of reduced TiO2
have been performed, none of these has applied both surface-sensitive
(electron yield) and bulk-sensitive (fluorescence yield) NEXAFS to ch
aracterize reduced TiO2(001) single-crystal surfaces. The fluorescence
yield NEXAFS of polycrystalline samples of the suboxides TiO and Ti2O
3 were used as standards to fingerprint reduced cations on the TiO2(00
1) surface. NEXAFS has allowed us to estimate the concentration of oxy
gen and titanium in the near-surface region of reduced and reoxidized
samples. The results of this study demonstrate that oxygen is preferen
tially removed during ion bombardment, that the depth of the altered l
ayer is comparable to the ion penetration depth, and that the electron
ic environment of cations in the altered layer is comparable to that o
f cations in titanium suboxides. The extents of reduction calculated f
rom NEXAFS results for reduced and reoxidized surfaces as a function o
f annealing temperature compare favorably with those previously determ
ined by analysis of Ti 2p XPS data. (C) 1998 Elsevier Science B.V.