By molecular beam epitaxy (MBE) we have prepared (0001)-hcp Ru films o
n SrTiO3(111), Al2O3(0001) and Al2O3(11(2) over bar 0) surfaces. Refle
ction high-energy electron diffraction (RHEED) intensity oscillations
are observed during the growth of the Ru films, up to temperatures of
870 K. Despite that, we found that high substrate temperatures are req
uired for the initial deposition of Ru. Scanning tunnelling microscopy
(STM) investigations show monoatomic terraces of up to 100 nm in widt
h, and atomic resolution on Ru, although the imaging was performed und
er ambient conditions. The high crystallinity of the Ru films is prove
n by RHEED and by the appearance of interference fringes in the peak p
rofiles of high-angle X-ray diffraction patterns. V and Cr grow pseudo
morphic on Ru in the layer-by-layer growth mode for the first few mono
layers (ML), afterwards island growth is obtained. In-plane lattice pa
rameter measurements performed during the growth of the V films at roo
m temperature show a rather slow relaxation with the first 10-15 ML to
the bulk bcc value, in contrast to Cr films. (C) 1998 Elsevier Scienc
e B.V.